Case Study: SPTS Technologies Ltd.

Extending understanding of electrostatic chuck operation to improve wafer processing

The SPTS division of KLA provides advanced wafer processing solutions to the world’s leading semiconductor and microelectronic device manufacturers. Increasing demand for semiconductor devices is driving demand for wafer processing equipment. End market applications for KLA's wafer processing equipment include microelectromechanical systems (MEMS), advanced packaging, photonics, high speed RF IC’s, and power semiconductors.

The electrostatic chuck (ESC) is a key component in vacuum-based wafer processing equipment. In addition to its supply within the equipment, there is also a growing demand for replacement ESCs from the aftersales market. To maintain supply of high quality ESCs, an in-depth understanding of their operational characteristics and possible failure modes is required.

The Electrostatic Chuck (ESC) is comprised of upper ceramic layers positioned on a metal body. Electrodes are attached to the ceramic to generate the charge. RTV silicone between the layers provides good thermal contact and compensates for differences in thermal expansion.

Challenge:

To fully understand the operation of the ESC and to identify its possible failure modes, to ensure integrity during use and to support future developments for real time monitoring.

Solution:

Three ASTUTE EAST institutions are collaborating to evaluate the manufacture and operation of the electrostatic chuck (ESC).

A computer model of the ESC will be developed to replicate operation, and to simulate failure conditions.

A Failure Mode and Effect Analysis (FMEA) will be carried out to identify and prioritise failure modes identified.

For future developments, the potential of Industrial Internet of Things (IIoT) devices linked with the equipment for real time data analytics and advanced failure information will be explored.

Impact:

The impact of the project will enable KLA to remain competitive in this fast-growing market with the potential to provide enhanced diagnostics to their customers and field engineers.